The Diamond H5 series vacuum robots represent a significant engineering advancement in the design and reliability of wafer handling equipment. The robots feature an innovative, all-in-one design which incorporates the motion controller, servo amplifiers, and power supply within the robot’s industry standard footprint.
Benefiting from technologically superior components, the robots utilize ultra low inertia, high-response brushless servomotors coupled with zero-backlash Harmonic Drive® gears to achieve greatly enhanced dexterity and precision. Powerful native wafer handling and scripting languages facilitate rapid software development for embedding the robots into an OEM application environment.
High-strength structural members enable top, bottom or side mount configurations without compromising the system rigidity. In addition, a 32-bit, real-time kernel delivers accurate motion profiling along smooth continuous trajectories, while the distributed control architecture allows a seamless integration with linear tracks, pre-aligners, and other sub-components.