It has the capacity to address a broad spectrum of highly demanding alignment and metrology applications. By employing proprietary low noise technology, stage position noise has been reduced so that in the majority of implementations it is just a few tens of pm.
The NPC-D-5200 controller has a compact (268x194x70mm) and lightweight (1.7kg) construction. It incorporates serial (RS232), USB 2.0 and Ethernet interfaces, so that connectivity options are not restricted and system flexibility is maximised. The unit has an operational temperature range that covers 10°C to 40°C.