Due to the lack of rolling elements, there is no bearing rumble to affect the uniformity or straightness of motion. PIHera precision closed-loop Z-stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1nm, in a compact, FEA optimised package for high stiffness and long lifetime. Direct metrology provides higher stability and linearity compared to inferred metrology feedback, usually based on piezo resistive strain gauges, a technique also available from PI for entry level piezo nanopositioners. Cost effective, positioning accuracy of 0.02%, and optional vacuum compatibility make these compact stages suitable for applications that require frictionless, vibration-free, positioning with high linearity.
Driven by PI’s proprietary PICMA piezo ceramics, PIHera piezo stages have unique properties especially important in long-term research and industrial applications, including a temperature tolerance range of -20 to 80°C.
These ultra-precise piezo mechanic nanopositioning devices are a result of PI’s 40 years of experience with piezo flexure positioners, developed by the world’s most experienced nanopositioning design teams. PI flexure piezo stages can repeatedly provide nanometre and sub-nanometre size steps, and their high stiffness and advanced control algorithms allow them to move and settle quickly, within a few milliseconds. PI also offers high-speed models that settle in under one millisecond. Flexure stages provide friction-free motion with excellent straightness and flatness data. Similar performance can only be achieved with air bearings and magnetic levitation guiding systems, both technologies also offered by PI.