Precision design with guaranteed accuracy

Aimed at applications in x-ray diffraction, sensor testing and high force device manipulation, the HEX500-350HL high load, precision hexapod from Aerotech features high load capacity, large travels, high speeds and sub-micrometer precision.

The HEX500-350HL is actuated with six high accuracy struts that are built with precision preloaded bearings, ball screws and drive components. Unlike hexapods driven by DC brushed servo motors, the HEX500-350HL is driven by AC brushless, slotless servo motors that maximise device lifetime and performance.

The servo motors are directly coupled to the actuator ball-screw enabling increased drive stiffness, higher positioning accuracy and better minimum incremental motion (20nm in XYZ and 0.2μrad for θxθyθz). The strut pivot joints are engineered to provide low friction and high stiffness enhancing overall hexapod performance.

The HEX500-350HL is designed with flexibility and customisation in mind. The platform and base can be modified with user specific features or mounting patterns. The HEX500-350HL is designed with a 150mm diameter clear aperture in both the platform and base to allow for workpiece access from the bottom. The base is designed with mounting holes to adapt directly to English or metric optical tables. The hexapod can also be vacuum prepared for demanding applications in synchrotron sample or optics adjustment, semiconductor manufacturing and inspection, or satellite sensor testing.

Driving the HEX500-350HL is Aerotech’s A3200 motion control software. The A3200 controller allows easy programming and control of the hexapod in any user defined coordinate system. Aerotech’s HexGen software gives the user the ability to easily visualise and simulate the available workspace.